ELECTROSTATIC ACTUATOR HAVING MULTILAYER STRUCTURE

Provided is a stacked electrostatic actuator capable of maintaining insulation performance between conductor layers even when an elastic layer is deformed due to a creep phenomenon. An electrostatic actuator includes a plurality of electrode films that are stacked and bonded, wherein each of the ele...

Full description

Saved in:
Bibliographic Details
Main Authors ITO, Makoto, IZUMITANI, Hikaru, SANEYOSHI, Keiji
Format Patent
LanguageEnglish
French
German
Published 06.04.2022
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:Provided is a stacked electrostatic actuator capable of maintaining insulation performance between conductor layers even when an elastic layer is deformed due to a creep phenomenon. An electrostatic actuator includes a plurality of electrode films that are stacked and bonded, wherein each of the electrode films has a five-layer structure including an elastic layer, an insulating layer, a conductor layer, an insulating layer, and an elastic layer, a Young's modulus of a material for forming the elastic layers is smaller than a Young's modulus of a material for forming the insulating layers, and a spring constant of a material for forming the elastic layers increases as the electrode films extend in a stacking direction.
Bibliography:Application Number: EP20200813125