SENSOR DEVICE

A sensor device includes a substrate having a substrate surface, a first IDT electrode, a second IDT electrode, and a waveguide. The first IDT electrode and the second IDT electrode are positioned on the substrate surface. The waveguide is positioned on the substrate surface and between the first ID...

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Bibliographic Details
Main Authors FUKUURA Atsuomi, KATTA Hiroshi, NAKAMURA Shinnosuke
Format Patent
LanguageEnglish
French
German
Published 23.11.2022
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A sensor device includes a substrate having a substrate surface, a first IDT electrode, a second IDT electrode, and a waveguide. The first IDT electrode and the second IDT electrode are positioned on the substrate surface. The waveguide is positioned on the substrate surface and between the first IDT electrode and the second IDT electrode. At least one of the first IDT electrode and the second IDT electrode includes a reference electrode and a signal electrode each including a plurality of electrode fingers, the plurality of electrode fingers being arranged in a juxtaposed manner in one direction. A distance between the at least one of the first IDT electrode and the second IDT electrode and the waveguide is shorter than an interval between the reference electrode and the signal electrode in the one direction.
Bibliography:Application Number: EP20200815168