METHOD OF FORMING CNT-BNNT NANOCOMPOSITE PELLICLE
Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coa...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
30.11.2022
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Subjects | |
Online Access | Get full text |
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