METHOD OF FORMING CNT-BNNT NANOCOMPOSITE PELLICLE

• Main Authors: CHATTERJEE, Sukti, MELNIK, Yuriy, NARWANKAR, Pravin K
• Format: Patent
• Language: English; French; German
• Published: 30.11.2022
• Subjects: ADHESIVES; APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; CINEMATOGRAPHY; DYES; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MATERIALS THEREFOR; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NANOTECHNOLOGY; NATURAL RESINS; ORIGINALS THEREFOR; PAINTS; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; POLISHES; PREPARATION OF CARBON BLACK; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; THEIR RELEVANT APPARATUS; TRANSPORTING; TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS,TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES

Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coated in a first conformal layer of boron nitride. The pellicle may comprise a plurality of boron nitride nanotubes formed simultaneously as the first conformal layer of boron nitride. The pellicle may comprise a carbon nanotube coating disposed on the first conformal layer of boron nitride and a second conformal layer of boron nitride or boron nitride nanotubes disposed on the carbon nanotube coating. The pellicle is UV transparent and is non-reactive in hydrogen radical environments.