CANTILEVER, ULTRASOUND ACOUSTIC MICROSCOPY DEVICE COMPRISING THE CANTILEVER, METHOD OF USING THE SAME AND LITHOGRAPHIC SYSTEM INCLUDING THE SAME

A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate fr...

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Bibliographic Details
Main Authors VAN ES, Maarten Hubertus, MOHTASHAMI, Abbas, QUESSON, Benoit André Jacques, VAN NEER, Paul Louis Maria Joseph
Format Patent
LanguageEnglish
French
German
Published 15.12.2021
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.
Bibliography:Application Number: EP20200704099