More Information
Summary:An etchant composition includes an inorganic acid compound of about 8 wt% to about 15 wt%, a sulfonic acid compound of about 2.5 wt% to about 8 wt%, a sulfate compound of about 6 wt% to about 14 wt%, an organic acid compound of about 40 wt% to about 55 wt%, a metal or metal salt of about 0.01 wt% to about 0.06 wt%, and water.
Bibliography:Application Number: EP20210171001