SYSTEM FOR CONTROLLED DEPOSITING OF A FLUID ON A SUBSTRATE
The present invention relates to a system for controlled deposition of a fluid on a substrate and also to a method employing the system. The system comprises:a nanoinjector,a mechanical resonator fixed to the nanoinjector, the mechanical resonator being adapted to detect contact between the nanoinje...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
18.10.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a system for controlled deposition of a fluid on a substrate and also to a method employing the system. The system comprises:a nanoinjector,a mechanical resonator fixed to the nanoinjector, the mechanical resonator being adapted to detect contact between the nanoinjector and the substrate,control means of the mechanical resonator comprising:an excitation means adapted to cause the mechanical resonator to oscillate at an oscillation frequency (fi),a detector means adapted to detect the oscillation of the mechanical resonator,a regulator means adapted to adjust the contact between the nanoinjector and the substrate by controlling the oscillation of the mechanical resonator. |
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Bibliography: | Application Number: EP20190845772 |