VIBRATION-DRIVEN ENERGY HARVESTING ELEMENT

The vibration-driven energy harvesting element includes a fixed electrode portion and a moveable electrode portion formed in a second layer of a substrate provided with a first layer and the second layer with an insulation layer interposed therebetween; a frame body formed from the first layer and t...

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Bibliographic Details
Main Authors TOSHIYOSHI, Hiroshi, HONMA, Hiroaki, MITSUYA, Hiroyuki
Format Patent
LanguageEnglish
French
German
Published 30.08.2023
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Summary:The vibration-driven energy harvesting element includes a fixed electrode portion and a moveable electrode portion formed in a second layer of a substrate provided with a first layer and the second layer with an insulation layer interposed therebetween; a frame body formed from the first layer and the second layer disposed with the insulation layer interposed therebetween, the frame body supporting the fixed electrode portion in the second layer; an elastically-supporting portion formed in the first layer and elastically supporting the moveable electrode portion by a beam portion joined to the first layer of the frame body; and a first conduction portion electrically connecting the moveable electrode portion and the elastically-supporting portion.
Bibliography:Application Number: EP20200744736