HEAT REMOVAL MECHANISM FOR STACK-BASED ELECTRONIC DEVICE WITH PROCESS CONTROL COMPONENT AND PROCESSING COMPONENTS

An electronic device (130) which comprises a stack (102) comprising at least one electrically conductive layer structure (104) and/or at least one electrically insulating layer structure (106), a plurality of processing components (108) on and/or in the stack (102), a process control component (110)...

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Bibliographic Details
Main Authors Leitgeb, Markus, Grober, Gernot, Weis, Gerald, Young, Hy Jung, Gavagnin, Marco
Format Patent
LanguageEnglish
French
German
Published 08.09.2021
Subjects
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