SUBSTRATE-CONVEYING DEVICE, AND SUBSTRATE-PROCESSING DEVICE COMPRISING SUBSTRATE-CONVEYING DEVICE

• Main Authors: KASHIWAGI, Makoto, NANJO, Takahiro, AKAZAWA, Kenichi, AOYAMA, Hideharu, KOBA, Takashi, MATSUGU, Asagi, DU, Fong-Jie, TOGAWA, Tetsuji, YAZAWA, Akihiro, MITSUYA, Takashi, KOBAYASHI, Kenichi
• Format: Patent
• Language: English; French; German
• Published: 23.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; HANDLING THIN OR FILAMENTARY MATERIAL; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; POLISHING; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To provide an automated apparatus for conveying a rectangular substrate. According to one embodiment, there is provided a substrate conveying apparatus for conveying the rectangular substrate. The substrate conveying apparatus includes a plurality of conveyance rollers, a plurality of roller shafts, a motor, and a pusher. The plurality of conveyance rollers are configured to support a lower surface of the substrate. To the plurality of roller shafts, the plurality of conveyance rollers are mounted. The motor is configured to rotate the plurality of roller shafts. The pusher is for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers. The pusher includes a stage configured to pass through a clearance between the plurality of roller shafts.