ELECTRO-ACOUSTIC RESONATOR AND METHOD OF FORMING THEREOF

An electro-acoustic resonator comprises a piezoelectric substrate on which an electrode structure is disposed. The electrode structure comprises a metal layer of aluminum and copper, a barrier layer forming a barrier against the diffusion of copper and another metal layer disposed on the barrier lay...

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Bibliographic Details
Main Authors JEWULA, Tomasz, POH, Siew Li, HONAL, Matthias, KOH, Siew Ling, QIAO, Pei Wen
Format Patent
LanguageEnglish
French
German
Published 03.03.2021
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:An electro-acoustic resonator comprises a piezoelectric substrate on which an electrode structure is disposed. The electrode structure comprises a metal layer of aluminum and copper, a barrier layer forming a barrier against the diffusion of copper and another metal layer disposed on the barrier layer comprising aluminum. An AlCu intermetallic phase formed after an anneal is restricted to the portion beneath the barrier layer so that Galvano-corrosion of the electrode structure is avoided.
Bibliography:Application Number: EP20190719850