COMPACT HIGH VOLTAGE RF GENERATOR USING A SELF-RESONANT INDUCTOR
RF generators including active devices driving series resonant circuits are described. The series resonant circuits include a self-resonant dual inductor. The RF generators can be used to drive capacitive loads.
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
17.02.2021
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Subjects | |
Online Access | Get full text |
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Summary: | RF generators including active devices driving series resonant circuits are described. The series resonant circuits include a self-resonant dual inductor. The RF generators can be used to drive capacitive loads. |
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Bibliography: | Application Number: EP20200200610 |