METHOD OF MANUFACTURING A THIN FILM PHOTOVOLTAIC PRODUCT

• Main Authors: BOSMAN, Johan, GEVAERTS, Veronique Stephanie
• Format: Patent
• Language: English; French; German
• Published: 13.01.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of manufacturing a photovoltaic product (1) with a plurality of photovoltaic cells (1A,...,1F) is disclosed. The method comprises depositing a stack with a first electrode layer (12), a second electrode layer (16) and a photovoltaic layer (14) arranged between said first and said second electrode layers. The method further comprises partitioning the stack into respective lateral portions. In particular partitioning includes forming (S4) a trench (20) extending through the second electrode layer (16) and the photovoltaic layer (14) to expose the first electrode layer (12). To form the trench (20) the stack is first irradiated (S4A) with a first laser beam (B1) with a first spotsize (d1) in a direction transverse to the trench (20) to be formed, and with a first wavelength (λ1) for which the photovoltaic layer (14) has a relatively high absorption coefficient as compared to that of the second electrode layer (16). The stack is subsequently irradiated (S4B) with a second laser beam (B2, B2') with a second spotsize (d2) in said transverse direction, greater than said first spotsize, and with a second wavelength (λ2) for which the photovoltaic layer (14) has a relatively low absorption coefficient as compared to that of the second electrode layer (16).