CRYOGENIC PROBE STATION WITH LOADING ASSEMBLY

The present invention provides a testing device (100) for electrically testing integrated circuits on a wafer (102). The testing device (100) comprises a vacuum chamber (109), a chuck (101) for holding the wafer (102), a probe card (103) for electrically contacting the integrated circuits, and a rad...

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Bibliographic Details
Main Authors SALMINEN, Timo, JUNES, Aki, KUUKKALA, Ari, ROSCHIER, Leif, HENTTONEN, Vesa, GUNNARSSON, David, MANNINEN, Matti
Format Patent
LanguageEnglish
French
German
Published 04.11.2020
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The present invention provides a testing device (100) for electrically testing integrated circuits on a wafer (102). The testing device (100) comprises a vacuum chamber (109), a chuck (101) for holding the wafer (102), a probe card (103) for electrically contacting the integrated circuits, and a radiation shield (107) arranged inside the vacuum chamber (109) and enclosing the chuck (101) and the probe card (103). In the testing device (100), the vacuum chamber (109) is provided with a gate valve (123), the radiation shield (107) is provided with a hatch (122), and the testing device (100) comprises a wafer loading assembly (125) for loading the wafer (102) onto the chuck (101) through the gate valve (123) and the hatch (122).
Bibliography:Application Number: EP20190172492