X-RAY INSPECTION DEVICE

An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 t...

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Bibliographic Details
Main Authors OGATA, Kiyoshi, MATSUSHIMA, Naoki, ITO, Yoshiyasu, ASANO, Shigematsu, YAMAGUCHI, Ryotaro, UMEGAKI, Shiro, OMOTE, Kazuhiko, HORADA, Katsutaka, MOTONO, Hiroshi, HIGUCHI, Akifusa, YOSHIHARA, Sei, TAKAHASHI, Hideaki
Format Patent
LanguageEnglish
French
German
Published 08.09.2021
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a χ rotation mechanism 35 for rotating the sample placement unit 11 and a φ-axis about a χ-axis that is orthogonal to a θs-axis and a θd-axis at a measurement point P and extends horizontally.
Bibliography:Application Number: EP20180893911