MEMS VIBRATOR

Provided is a MEMS device that includes a piezoelectric film, a first electrode and a second electrode sandwiching the piezoelectric film, a protective film provided to cover at least part of the second electrode and having a cavity that opens part of the second electrode, a third electrode that mak...

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Main Authors KISHI, Takehiko, GOTO, Yuichi, KAMOTO, Taku, OKAWA, Tadayuki, INOUE, Yoshihisa, UMEDA, Keiichi
Format Patent
LanguageEnglish
French
German
Published 02.08.2023
Subjects
BASIC ELECTRONIC CIRCUITRY
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
RESONATORS
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Summary:Provided is a MEMS device that includes a piezoelectric film, a first electrode and a second electrode sandwiching the piezoelectric film, a protective film provided to cover at least part of the second electrode and having a cavity that opens part of the second electrode, a third electrode that makes contact with the second electrode at least in the cavity and is provided so as to cover at least part of the protective film, and a first wiring layer having a first contact portion in contact with the third electrode.
Bibliography:Application Number: EP20180905143