METHODS AND APPARATUS FOR INCREASING EFFICIENCY AND OPTICAL BANDWIDTH OF A MICROELECTROMECHANICAL SYSTEM PISTON-MODE SPATIAL LIGHT MODULATOR

A piston-mode spatial light modulator (SLM) includes a mirror and an electrode. The electrode is attached to the mirror. The electrode includes: a rigid body; and three spring legs coupled to the rigid body and configured to displace the rigid body responsive to an electrostatic force applied to the...

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Bibliographic Details
Main Authors FRUEHLING, Adam, Joseph, HALL, James, Norman
Format Patent
LanguageEnglish
French
German
Published 17.03.2021
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Summary:A piston-mode spatial light modulator (SLM) includes a mirror and an electrode. The electrode is attached to the mirror. The electrode includes: a rigid body; and three spring legs coupled to the rigid body and configured to displace the rigid body responsive to an electrostatic force applied to the electrode.
Bibliography:Application Number: EP20180885789