HIGH-BRIGHTNESS LPP SOURCE AND METHODS FOR GENERATING RADIATION AND MITIGATING DEBRIS
High-brightness LPP source and method for generating short-wavelength radiation which include a vacuum chamber (1) with an input window (6) for a laser beam (7) focused into the interaction zone (5), an output window (8) for the exit of the short-wavelength radiation beam (9); the rotating target as...
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Format | Patent |
Language | English French German |
Published |
30.09.2020
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Abstract | High-brightness LPP source and method for generating short-wavelength radiation which include a vacuum chamber (1) with an input window (6) for a laser beam (7) focused into the interaction zone (5), an output window (8) for the exit of the short-wavelength radiation beam (9); the rotating target assembly (3), having an annular groove (11); the target (4) as a layer of a molten metal formed by centrifugal force on the surface of the distal wall (13) of the annular groove (11) while the proximal wall (14) of the annular groove is designed to provide a line of sight between the interaction zone and both the input and output windows particularly during laser pulses. A method for mitigating debris particles comprises using an target orbital velocity high enough for the droplet fractions of the debris particles exiting the rotating target assembly not to be directed towards the input and output windows. |
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AbstractList | High-brightness LPP source and method for generating short-wavelength radiation which include a vacuum chamber (1) with an input window (6) for a laser beam (7) focused into the interaction zone (5), an output window (8) for the exit of the short-wavelength radiation beam (9); the rotating target assembly (3), having an annular groove (11); the target (4) as a layer of a molten metal formed by centrifugal force on the surface of the distal wall (13) of the annular groove (11) while the proximal wall (14) of the annular groove is designed to provide a line of sight between the interaction zone and both the input and output windows particularly during laser pulses. A method for mitigating debris particles comprises using an target orbital velocity high enough for the droplet fractions of the debris particles exiting the rotating target assembly not to be directed towards the input and output windows. |
Author | MEDVEDEV, Vyacheslav Valerievich KRYVOKORYTOV, Mikhail Sergeyevich VINOKHODOV, Aleksandr Yurievich IVANOV, Vladimir Vitalievich KRIVTSUN, Vladimir Mikhailovich LASH, Aleksandr Andreevich SIDELNIKOV, Yury Viktorovich YAKUSHEV, Oleg Feliksovich KOSHELEV, Konstantin Nikolaevich |
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DocumentTitleAlternate | LPP-QUELLE MIT HOHER HELLIGKEIT UND VERFAHREN ZUR ERZEUGUNG VON STRAHLUNG UND MINDERUNG VON RÜCKSTÄNDEN SOURCE LPP À HAUTE LUMINOSITÉ ET PROCÉDÉS D'ÉMISSION D'UN RAYONNEMENT ET D'ATTÉNUATION DE DÉBRIS |
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Title | HIGH-BRIGHTNESS LPP SOURCE AND METHODS FOR GENERATING RADIATION AND MITIGATING DEBRIS |
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