HIGH-BRIGHTNESS LPP SOURCE AND METHODS FOR GENERATING RADIATION AND MITIGATING DEBRIS

High-brightness LPP source and method for generating short-wavelength radiation which include a vacuum chamber (1) with an input window (6) for a laser beam (7) focused into the interaction zone (5), an output window (8) for the exit of the short-wavelength radiation beam (9); the rotating target as...

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Main Authors SIDELNIKOV, Yury Viktorovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRYVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Format Patent
LanguageEnglish
French
German
Published 30.09.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:High-brightness LPP source and method for generating short-wavelength radiation which include a vacuum chamber (1) with an input window (6) for a laser beam (7) focused into the interaction zone (5), an output window (8) for the exit of the short-wavelength radiation beam (9); the rotating target assembly (3), having an annular groove (11); the target (4) as a layer of a molten metal formed by centrifugal force on the surface of the distal wall (13) of the annular groove (11) while the proximal wall (14) of the annular groove is designed to provide a line of sight between the interaction zone and both the input and output windows particularly during laser pulses. A method for mitigating debris particles comprises using an target orbital velocity high enough for the droplet fractions of the debris particles exiting the rotating target assembly not to be directed towards the input and output windows.
Bibliography:Application Number: EP20180880978