HYDROXIDE-CATALYSIS BONDING OF OPTICAL COMPONENTS USED IN DUV OPTICAL SYSTEMS

A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface ca...

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Bibliographic Details
Main Authors DUNN, Michael, Morgan, WESTCOTT, Mark, Ranney, MICHALOSKI, Paul, Francis, MCMICHAEL, Todd, Robert
Format Patent
LanguageEnglish
French
German
Published 16.09.2020
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMISTRY
CINEMATOGRAPHY
ELECTROGRAPHY
GLASS
HOLOGRAPHY
JOINING GLASS TO GLASS OR OTHER MATERIALS
MATERIALS THEREFOR
METALLURGY
MINERAL OR SLAG WOOL
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
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Summary:A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.
Bibliography:Application Number: EP20180801227