ASSISTANCE SYSTEM FOR SPECIFIC TEST, AND ASSISTANCE METHOD AND PROGRAM FOR SPECIFIC TEST

The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sampl...

Full description

Saved in:
Bibliographic Details
Main Authors OOMINAMI, Yuusuke, TADA, Nobuyoshi, TANAKA, Shigeya, GOTO, Maya, NOGUCHI, Minori
Format Patent
LanguageEnglish
French
German
Published 05.08.2020
Subjects
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sample, and analyzes and evaluates the object to be tested contained in the testing sample by checking image data and element analysis data that are acquired by a measuring device in accordance with a control program for the test recipe information, against reference image data and reference element analysis data that are used as evaluation references for the object to be tested.
Bibliography:Application Number: EP20180862717