NEW ON-CHIP S PARAMETER CALIBRATION METHOD
The present application is applicable to the technical field of terahertz on-wafer measurement, and provides a new on-wafer S-parameter calibration method and device. The method includes: performing two-port calibration on a waveguide end face when a probe is not connected to a test system; performi...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French German |
Published |
20.04.2022
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Subjects | |
Online Access | Get full text |
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