NEW ON-CHIP S PARAMETER CALIBRATION METHOD

• Main Authors: FU, Xingchang, TIAN, Xiuwei, WANG, Yibang, CAO, Jian, WU, Aihua, LIU, Chen, LI, Chong, LIU, Yanan, LIANG, Faguo
• Format: Patent
• Language: English; French; German
• Published: 20.04.2022
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The present application is applicable to the technical field of terahertz on-wafer measurement, and provides a new on-wafer S-parameter calibration method and device. The method includes: performing two-port calibration on a waveguide end face when a probe is not connected to a test system; performi...