RESONANCE DEVICE

• Main Authors: KAMOTO, Taku, OKAWA, Tadayuki, UMEDA, Keiichi
• Format: Patent
• Language: English; French; German
• Published: 17.06.2020
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; GENERATION OF NOISE BY SUCH CIRCUITS; GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; RESONATORS; TRANSPORTING

A resonance device that is capable of maintaining a vacuum in a vibration space and inhibit the height of a product from increasing is provided.A resonator includes a lower electrode, an upper electrode, and a piezoelectric film that is formed between the lower electrode and the upper electrode. A MEMS device includes an upper lid that faces the upper electrode of the resonator, and a lower lid that faces the lower electrode of the resonator and that seals the resonator together with the upper lid. A CMOS device is mounted on a surface of the upper lid or the lower lid opposite a surface that faces the resonator. The CMOS device includes a CMOS layer and a protective layer that is disposed on a surface of the CMOS layer opposite a surface that faces the resonator. The upper lid or the lower lid to which the CMOS device is joined includes a through-electrode that electrically connects the CMOS device and the resonator to each other.