CERAMIC PRESSURE SENSOR

• Main Authors: FACCHETTI, Fermo, MAY, Roberto, LEMMA, Federico Domenico
• Format: Patent
• Language: English; French; German
• Published: 16.08.2023
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The ceramic pressure sensor (1) comprises a ceramic body (2) and an electronic circuit (3a, 3b, 3c) supported by the ceramic body (2), the ceramic body (2) comprising a flexible membrane (4) made of ceramic material capable of being deformed as a result of the pressure to be sensed and a rigid support (5) made of ceramic material for supporting the flexible membrane (4), the electronic circuit (3a, 3b, 3c) being configured to generate an electrical signal as a function of the deformation of the flexible membrane (4), a protection element (6) also being provided, made of ceramic material permanently joined to the ceramic body (2), the protection element (6) delimiting with the ceramic body a housing chamber (7) for housing at least part of the electronic circuit (3a, 3b, 3c), the housing chamber (7) having an electrical connection means (8) for connecting the part of the electronic circuit (3a, 3b, 3c) with the outside of the housing chamber (7).