OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME

• Main Authors: SUGIMOTO Tatsuya, SUZUKI Tomofumi, KOTANI Kyosuke
• Format: Patent
• Language: English; French; German
• Published: 13.05.2020
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; RADIATION PYROMETRY; TESTING; TRANSPORTING

An optical device includes: a base; a movable portion which includes an optical function portion; an elastic support portion which supports the movable portion so that the movable portion is movable along a first direction; a first comb electrode which is provided to the base; and a second comb electrode which includes a plurality of second comb fingers provided to at least one of the movable portion and the elastic support portion. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever connected to the torsion bar. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger which are adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.