MICRO-ELECTRICAL MECHANICAL SYSTEM SENSOR PACKAGE AND METHOD OF MANUFACTURE THEREOF
A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening; a second sidewall opposite the first sidewall;...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
01.04.2020
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Subjects | |
Online Access | Get full text |
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Abstract | A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening; a second sidewall opposite the first sidewall; a third sidewall attaching the first sidewall to the second sidewall; and a first contact pad disposed on an exterior surface of the third sidewall, wherein the first contact pad is configured to provide at least one of a power connection or a signal connection for the first sensor. |
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AbstractList | A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening; a second sidewall opposite the first sidewall; a third sidewall attaching the first sidewall to the second sidewall; and a first contact pad disposed on an exterior surface of the third sidewall, wherein the first contact pad is configured to provide at least one of a power connection or a signal connection for the first sensor. |
Author | CHUA, Kok Yau CHIANG, Chau Fatt |
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DocumentTitleAlternate | BOÎTIER DE CAPTEUR DE SYSTÈME MÉCANIQUE MICRO-ÉLECTRIQUE ET SON PROCÉDÉ DE FABRICATION MIKROELEKTRISCHES MECHANISCHES SYSTEMSENSORGEHÄUSE UND VERFAHREN ZUR HERSTELLUNG DAVON |
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Notes | Application Number: EP20190196780 |
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PublicationDecade | 2020 |
PublicationYear | 2020 |
RelatedCompanies | Infineon Technologies AG |
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Snippet | A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first... |
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SubjectTerms | DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PUBLIC ADDRESS SYSTEMS TRANSPORTING |
Title | MICRO-ELECTRICAL MECHANICAL SYSTEM SENSOR PACKAGE AND METHOD OF MANUFACTURE THEREOF |
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