MULTI-ELECTRON-BEAM IMAGING APPARTUS WITH IMPROVED PERORMANCE

An electron beam imaging apparatus comprising:- A specimen holder, for holding a specimen;- An electron source, for producing a precursor electron beam;- An aperture plate comprising an array of apertures, for producing an array of electron beams from said precursor electron beam;- An electron beam...

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Bibliographic Details
Main Authors Veen, van Gerard Nicolaas Anne, Mohammadi-Gheidari, Ali, Kieft, Erik René, Tiemeijer, Peter Christiaan
Format Patent
LanguageEnglish
French
German
Published 18.03.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:An electron beam imaging apparatus comprising:- A specimen holder, for holding a specimen;- An electron source, for producing a precursor electron beam;- An aperture plate comprising an array of apertures, for producing an array of electron beams from said precursor electron beam;- An electron beam column, for directing said array of electron beams onto said specimen,wherein said electron beam column is configured to have a length L less than 300 mm.
Bibliography:Application Number: EP20180194496