METHOD FOR DETERMINING THE THERMAL DONOR CONCENTRATION OF A SEMICONDUCTOR SAMPLE

• Main Authors: MEHL, Torbjørn, KVALBEIN, Lisa, FAVRE, Wilfried, OLSEN, Espen, LETTY, Elénore, VEIRMAN, Jordi, BURUD, Ingunn
• Format: Patent
• Language: English; French; German
• Published: 02.11.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention relates to a method for determining the thermal donor concentration ([TD]test) of a test sample made of a semiconductor material. The method comprises the following steps:- providing (S11) a reference sample made of the same semiconductor material and having a known thermal donor conce...