THIN-PLATE SUBSTRATE HOLDING FINGER AND TRANSFER ROBOT PROVIDED WITH SAID FINGER

• Main Author: SAKATA Katsunori
• Format: Patent
• Language: English; French; German
• Published: 01.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

Provided is holding finger 21 with which a thin-plate substrate W that has been subjected to surface processing can be transferred without generating a natural oxide film on a surface to be processed of the thin-plate substrate W. The holding finger 21 comprises: a finger body 47 which is internally...