THIN-PLATE SUBSTRATE HOLDING FINGER AND TRANSFER ROBOT PROVIDED WITH SAID FINGER

• Main Author: SAKATA Katsunori
• Format: Patent
• Language: English; French; German
• Published: 01.05.2024
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

Provided is holding finger 21 with which a thin-plate substrate W that has been subjected to surface processing can be transferred without generating a natural oxide film on a surface to be processed of the thin-plate substrate W. The holding finger 21 comprises: a finger body 47 which is internally formed with a flow path for circulating an inert gas; a pipe member which provides communication between an inert gas supply source and the flow path; an ejection port for ejecting the inert gas onto the surface to be processed of the thin-plate substrate W, the ejection port communicating with the flow path and being disposed on a surface of the finger body 47 opposing the surface to be processed of the thin-plate substrate W; an abutting member 49 which is disposed on the surface of the finger body 47 on which the ejection port is formed, and which abuts a peripheral portion of the thin-plate substrate W; a clamp member 57 which is disposed to be movable forward and backward with respect to the thin-plate substrate W; and a clamp mechanism for the clamp member 57 forward and backward.