TUNNEL MAGNETO-RESISTIVE (TMR) SENSORS EMPLOYING TMR DEVICES WITH DIFFERENT MAGNETIC FIELD SENSITIVITIES FOR INCREASED DETECTION SENSITIVITY

Tunnel magneto-resistive (TMR) sensors employing TMR devices with different magnetic field sensitivities for increased detection sensitivity are disclosed. For example, a TMR sensor may be used as a biosensor to detect the presence of biological materials. In aspects disclosed herein, free layers of...

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Bibliographic Details
Main Authors HSU, Wah Nam, KANG, Seung, Hyuk, CHEN, Wei-Chuan, LI, Xia, STEVENS-YU, Nicholas, Ka Ming
Format Patent
LanguageEnglish
French
German
Published 05.02.2020
Subjects
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Summary:Tunnel magneto-resistive (TMR) sensors employing TMR devices with different magnetic field sensitivities for increased detection sensitivity are disclosed. For example, a TMR sensor may be used as a biosensor to detect the presence of biological materials. In aspects disclosed herein, free layers of at least two TMR devices in a TMR sensor are fabricated to exhibit different magnetic properties from each other (e.g., MR ratio, magnetic anisotropy, coercivity) so that each TMR device will exhibit a different change in resistance to a given magnetic stray field for increased magnetic field detection sensitivity. For example, the TMR devices may be fabricated to exhibit different magnetic properties such that one TMR device exhibits a greater change in resistance in the presence of a smaller magnetic stray field, and another TMR device exhibits a greater change in resistance in the presence of a larger magnetic stray field.
Bibliography:Application Number: EP20180718344