NON-CONTACT TEMPERATURE CALIBRATION TOOL FOR A SUBSTRATE SUPPORT AND METHOD OF USING THE SAME

Embodiments of the disclosure relate to methods for measuring temperature and a tool for calibrating temperature control of a substrate support in a processing chamber without contact with a surface of the substrate support. In one embodiment, a test fixture with a temperature sensor is removably mo...

Full description

Saved in:
Bibliographic Details
Main Authors MERCHANT, Niraj, RAMAKRISHNA, Mahesh, HAWRYLCHAK, Lara, NGUYEN, Binh, KAMP, Michael P, BEHDJAT, Mehran, GAGE, Dietrich, DAO, Christopher
Format Patent
LanguageEnglish
French
German
Published 22.01.2020
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
Online AccessGet full text

Cover

More Information
Summary:Embodiments of the disclosure relate to methods for measuring temperature and a tool for calibrating temperature control of a substrate support in a processing chamber without contact with a surface of the substrate support. In one embodiment, a test fixture with a temperature sensor is removably mounted to an upper surface of a chamber body of the processing chamber such that the temperature sensor has a field of view including an area of the substrate support that is adjacent to a resistive coil disposed in the substrate support. One or more calibration temperature measurements of the area of the substrate support are taken by the temperature sensor and simultaneously one or more calibration resistance measurements of the resistive coil are taken corresponding to each calibration temperature measurement. Temperature control of a heating element disposed in the substrate support is calibrated based on the calibration temperature and calibration resistance measurements.
Bibliography:Application Number: EP20180766901