BIOSENSOR

• Main Author: ZHONG, Cheng Frank
• Format: Patent
• Language: English; French; German
• Published: 07.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

A biosensor comprising a backside illumination CMOS image sensor including an electronic circuit layer and a photo-sensing layer over the electronic circuit layer is disclosed. The photo-sensing layer comprises a substrate layer (115) and a plurality of photodiodes (117), wherein a light receiving surface is defined by a surface of the photodiodes opposite to the electronic circuit layer. According to some embodiments, the biosensor further comprises a plurality of spots sized and functionalized to contain a nucleic acid macromolecule above the light receiving surface, a color filter material (127B) between each photodiode and each spot, a first metal layer (123B) over the substrate layer, wherein the first metal layer has a plurality of first openings over the plurality of photodiodes and the color filter materials are positioned in the plurality of first openings, a passivation layer (130) over the first metal layer and the plurality of color filter materials, a second metal layer (133B) over the passivation layer, wherein the second metal layer has a plurality of second openings over the plurality of color filter materials, and a plurality of micro-lenses (140A) over the second metal layer. Furthermore, a method of manufacturing the biosensor is described.