MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING

Disclosed is a micro-electro-mechanical switch, including a substrate (210) having a gate connection (215), a source connection (213), a drain connection (217) and a switch structure, coupled to the substrate. The switch structure includes a beam member (225), an anchor (221) and a hinge (223). The...

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Bibliographic Details
Main Authors ELLIS, Denis, WONG, Jo-ey, ECKL, Richard Tarik, GOGGIN, Raymond C, FITZGERALD, Padraig L
Format Patent
LanguageEnglish
French
German
Published 09.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
RELAYS
SELECTORS
TRANSPORTING
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Summary:Disclosed is a micro-electro-mechanical switch, including a substrate (210) having a gate connection (215), a source connection (213), a drain connection (217) and a switch structure, coupled to the substrate. The switch structure includes a beam member (225), an anchor (221) and a hinge (223). The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps (222) between the substrate and the anchor in regions proximate to the hinges.
Bibliography:Application Number: EP20190166451