SCANNING PROBE AND ELECTRON MICROSCOPE PROBES AND THEIR MANUFACTURE
Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotat...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
20.03.2024
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Subjects | |
Online Access | Get full text |
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Summary: | Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements. |
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Bibliography: | Application Number: EP20170840173 |