METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APPARATUSES

Disclosed is a method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers. The method comprises determining (e.g., optimizing simultaneously) the plural...

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Bibliographic Details
Main Authors WILDENBERG, Jochem Sebastiaan, WERKMAN, Roy, RAJASEKHARAN, Bijoy, VERGAIJ-HUIZER, Lydia Marianna, VAN ITTERSUM, Ronald
Format Patent
LanguageEnglish
French
German
Published 12.06.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:Disclosed is a method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers. The method comprises determining (e.g., optimizing simultaneously) the plurality of corrections comprising a correction for each layer, based on an actuation potential of the applicable manufacturing apparatus used in the formation of each layer. The method may also take into account the allowed a process window for each layer.
Bibliography:Application Number: EP20170205900