GATE STACK FOR HETEROSTRUCTURE DEVICE

A heterostructure semiconductor device includes a first active layer (102) and a second active layer (106) disposed on the first active layer. A two-dimensional electron gas layer (104) is formed between the first and second active layers. A sandwich gate dielectric layer structure (113) is disposed...

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Bibliographic Details
Main Author Ramdani, Jamal
Format Patent
LanguageEnglish
French
German
Published 08.05.2019
Subjects
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