GATE STACK FOR HETEROSTRUCTURE DEVICE
A heterostructure semiconductor device includes a first active layer (102) and a second active layer (106) disposed on the first active layer. A two-dimensional electron gas layer (104) is formed between the first and second active layers. A sandwich gate dielectric layer structure (113) is disposed...
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
08.05.2019
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Subjects | |
Online Access | Get full text |
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