MICROMECHANICAL RESONATOR
The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a suppo...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English French German |
Published |
08.05.2019
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (41, 43). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side (42) of the resonator element. The first location divides the width (w1) of the resonator element into a larger portion (w3) and a smaller portion (w2) such that a ratio between said smaller portion (w2) and the whole width (w1) is in a range of 0.10 to 0.28. The second location is at a longer side (44). The second location divides the length (l1) of the resonator element into a larger portion (l3) and a smaller portion (l2) such that a ratio between said smaller portion (l2) and the whole length (l1) is in a range of 0.36 to 0.48. |
---|---|
Bibliography: | Application Number: EP20170746152 |