IMPROVED SIMS SECONDARY ION MASS SPECTROMETRY TECHNIQUE

A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass...

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Bibliographic Details
Main Author Mulders, Johannes Jacobus Lambertus
Format Patent
LanguageEnglish
French
German
Published 01.05.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species, further comprising: - Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising a component selected from the group comprising perfluoroalkanes and their isomers.
Bibliography:Application Number: EP20170199158