PARTICLE DETECTOR MADE OF A SEMICONDUCTOR MATERIAL
A system for measuring a particle beam includes a central and peripheral part and a front and back panel. The central part includes a system for producing a space charge zone to be passed through by a beam to be measured, charge carriers of a first and second type being generated by the beam when th...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
27.03.2019
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Subjects | |
Online Access | Get full text |
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Summary: | A system for measuring a particle beam includes a central and peripheral part and a front and back panel. The central part includes a system for producing a space charge zone to be passed through by a beam to be measured, charge carriers of a first and second type being generated by the beam when the latter passes through the space charge zone. The peripheral part includes a system for collecting at least one type of charge carrier from among the first or second type. The peripheral part surrounds the central part such that a particle beam can pass through the central part without passing through the peripheral part, an orifice being provided in back panel, in a region of the central part such that the thickness of the region, along a normal axis to the front panel is less than that of the peripheral part along the normal axis. |
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Bibliography: | Application Number: EP20170723993 |