SURFACE ANALYSIS DEVICE AND SPECIMEN HEIGHT ADJUSTMENT METHOD

• Main Authors: YOKOUCHI, Kazushiro, TSUTSUMI, Kenichi, UCHIDA, Tatsuya, SHIMAMURA, Daisuke
• Format: Patent
• Language: English; French; German
• Published: 19.02.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A surface analysis device (100) includes a specimen stage (50) and a control section (80), and the control section (80) executes specimen image acquisition processing for obtaining a first specimen image captured with a first tilt angle of a specimen (S) and a second specimen image captured with a second tilt angle of the specimen (S), deviation amount calculation processing for calculating an amount of deviation of a specimen surface from a reference height based on the first specimen image and the second specimen image, and height control processing for controlling the specimen stage (50) based on the amount of deviation of the specimen surface. In the deviation amount calculation processing, a plurality of first partial images are generated by cutting out a plurality of areas from the first specimen image, a plurality of second partial images are generated by cutting out a plurality of areas corresponding to the plurality of areas cut out from the first specimen image, from the second specimen image, and the amount of deviation of the specimen surface is calculated by measuring respective shift amounts between corresponding images of the plurality of first partial images and the plurality of second partial images.