LASER PROCESSING MACHINE

Provided is a laser processing machine that processes a workpiece W using a laser beam. The laser processing machine comprises: first to fourth prisms 37, 47, 57, 67 that are disposed in order along an optical path of the laser beam from an upstream side; first to fourth spindles 32, 42, 52, 62 that...

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Bibliographic Details
Main Authors OMOKAWA, Hidefumi, NAKAGAWA, Kiyotaka, FUJITA, Yoshihito
Format Patent
LanguageEnglish
French
German
Published 24.06.2020
Subjects
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Summary:Provided is a laser processing machine that processes a workpiece W using a laser beam. The laser processing machine comprises: first to fourth prisms 37, 47, 57, 67 that are disposed in order along an optical path of the laser beam from an upstream side; first to fourth spindles 32, 42, 52, 62 that respectively and independently hold the first to fourth prisms 37, 47, 57, 67; first to fourth holding means 31, 41, 51, 61 that respectively and rotatably hold the first to fourth spindles 32, 42, 52, 62; first to fourth motors 35, 45, 55, 65 that are respectively composed of rotors 35b, 45b, 55b, 65b that are respectively fixed to the first to fourth spindles 32, 42, 52, 62, and stators 35a, 45a, 55a, 65a that are respectively fixed to the first to fourth holding means 31, 41, 51, 61; and prism moving means 101, 102 that move the first prism 37 and/or the second prism 47.
Bibliography:Application Number: EP20170753109