NON-OXIDE BASED DIELECTRICS FOR SUPERCONDUCTOR DEVICES
A method of forming a superconductor device is provided. The method includes depositing a non-oxide based dielectric layer over a substrate, depositing a photoresist material layer over the non-oxide based dielectric layer, irradiating and developing the photoresist material layer to form a via patt...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
01.12.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A method of forming a superconductor device is provided. The method includes depositing a non-oxide based dielectric layer over a substrate, depositing a photoresist material layer over the non-oxide based dielectric layer, irradiating and developing the photoresist material layer to form a via pattern in the photoresist material layer, and etching the non-oxide based dielectric layer to form openings in the non-oxide based dielectric layer based on the via pattern. The method further comprises stripping the photoresist material layer, and filling the openings in the non-oxide based dielectric with a superconducting material to form a set of superconducting contacts. |
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Bibliography: | Application Number: EP20160784760 |