A METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a s...

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Bibliographic Details
Main Authors VAN DER ZANDE, Willem, Joan, VLES, David, Ferdinand, JANSSEN, Paul, LEENDERS, Martinus, Hendrikus, Antonius, PÉTER, Mária, VERBRUGGE, Beatrijs, Louise, Marie-Joseph, Katrien, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, KUIJKEN, Michael, Alfred, Josephus, OOSTERHOFF, Sicco, HOUWELING, Zomer, Silvester, DRUZHININA, Tamara, CASIMIRI, Eric, Willem, Felix, VAN ZWOL, Pieter-Jan, VOORTHUIJZEN, Willem-Pieter
Format Patent
LanguageEnglish
French
German
Published 03.03.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate.
Bibliography:Application Number: EP20160757252