PLASMA GENERATOR AND METHOD FOR SETTING AN IONIC RATIO

A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.

Saved in:
Bibliographic Details
Main Authors WEILGUNI, Michael, PUFF, Markus
Format Patent
LanguageEnglish
French
German
Published 03.11.2021
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
Online AccessGet full text

Cover

More Information
Summary:A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.
Bibliography:Application Number: EP20160745106