MEMS SENSOR

A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) genera...

Full description

Saved in:
Bibliographic Details
Main Authors Blattmann, Rene, Niederberger, Mark, Christen, Thomas, Perktold, Lukas, Fröhlich, Thomas, Steele, Colin, Pham, Duy-Dong
Format Patent
LanguageEnglish
French
German
Published 28.04.2021
Subjects
AMPLIFIERS
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (1200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (1200a, 1200b) of the differential amplifier (200) and is therefore rejected.
Bibliography:Application Number: EP20160201746