ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT

• Main Authors: YOUK, SeungHyun, CHOI, SungWoo, KOOK, YunHo
• Format: Patent
• Language: English; French; German
• Published: 30.05.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A roll to roll fabrication apparatus (100, 200) includes: a vacuum chamber having an installation chamber (110, 210) and a process chamber (120, 220); a preprocessing unit (160, 260) in the installation chamber (110, 210) to process a surface of a film (101, 201) which is transferred to enhance a film (101, 201) characteristic in a subsequent CVD process; a process drum (130, 230) in the process chamber (120, 220) to wind the film (101, 201) thereon; a process treatment unit (132, 232) in the process chamber (120, 220) to form a layer by performing a CVD process on the film (101, 201) wound on the process drum (130, 230); and a plurality of heaters (170a, 170b, 170c; 270a, 270b, 270c) in the installation chamber (110, 210) and the process chamber (120, 220) to gradually increase a temperature of the film (101, 201) wound on the process drum (130, 230) to prevent application of a thermal impact to the film (101, 201) due to the high-temperature process drum (130, 230).