SYSTEM AND DEVICE FOR COLLECTING PIEZOELECTRIC ENERGY

A piezoelectric mechanical energy harvesting device is disclosed. The device is driven by environmentally-available mechanical energy. The device is an out-of-plane cantilever-based piezoelectric energy harvester based on ZnO nanostructures monolithically integrated with Schottky diodes and an entir...

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Bibliographic Details
Main Authors ESTEVE TINTO, Jaume, MURILLO RODRIGUEZ, Gonzalo, SACRISTAN RIQUELME, Jorge
Format Patent
LanguageEnglish
French
German
Published 20.09.2023
Subjects
ELECTRICITY
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Summary:A piezoelectric mechanical energy harvesting device is disclosed. The device is driven by environmentally-available mechanical energy. The device is an out-of-plane cantilever-based piezoelectric energy harvester based on ZnO nanostructures monolithically integrated with Schottky diodes and an entire-chip capacitor. ZnO will be utilized in two different forms: nanowires (NWs) and nanosheets (NSs). These nanostructures will be grown by a silicon-friendly hydrothermal process and using part of the top capacitor electrode as seed layer. A step-by-step process flow is proposed to integrate monolithically in a same device. This integration will allow reduced power losses and ease the combination of several generators without concerns about the stress and charge signs.
Bibliography:Application Number: EP20160813778