METHOD FOR DETERMINING AND COMPENSATING FOR GEOMETRIC ABERRATIONS

A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating...

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Bibliographic Details
Main Authors HAASE, Daniel, KLEMM, Frank, ROSCHER, Burkhard, KAUOLD, Tobias, ANHUT, Tiemo, SCHWEDT, Daniel
Format Patent
LanguageEnglish
French
German
Published 27.05.2020
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating an electronic image data set of this structure free of geometric imaging errors. Then, generating at least one electronic actual image data set with the imaging system; comparing the actual image data set with the reference image data set with respect to the locations of those pixels which have the same object point as origin in each case; and determining location deviations in the actual image data set compared to the reference image data set.
Bibliography:Application Number: EP20160727477