PURIFICATION OF CHLOROSILANES BY DISTILLATION AND ADSORPTION

Separation of chlorosilane mixtures containing boron, arsenic, and/or phosphorus impurities is facilitated by a distillative separation using at least one divided column, with recycle streams to a first column being passed through an external absorbent for the impurities.

Saved in:
Bibliographic Details
Main Authors Pätzold, Uwe, Aigner, Maximilian, Prochaska, Jan
Format Patent
LanguageEnglish
French
German
Published 26.06.2019
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:Separation of chlorosilane mixtures containing boron, arsenic, and/or phosphorus impurities is facilitated by a distillative separation using at least one divided column, with recycle streams to a first column being passed through an external absorbent for the impurities.
Bibliography:Application Number: EP20170198903